Fabrication of comb-drive actuators for straining nanostructured suspended graphene

Note: an asymmetric flexure mechanism for comb-drive actuators.

This Note presents a new asymmetric flexure design, the double parallelogram-tilted-beam double parallelogram (DP-TDP) flexure, that enables two times higher stroke in electrostatic comb-drive actuators, compared to the traditional symmetrically paired double parallelogram (DP-DP) flexure, while maintaining the same device footprint. Because of its unique kinematic configuration, the DP-TDP fle...

Transfer-free batch fabrication of large-area suspended graphene membranes.

We demonstrate a process for batch production of large-area (100-3000 microm(2)) patterned free-standing graphene membranes on Cu scaffolds using chemical vapor deposition (CVD)-grown graphene. This technique avoids the use of silicon and transfers of graphene. As one application of this technique, we fabricate transmission electron microscopy (TEM) sample supports. TEM characterization of the ...

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2◦ is achiev...

Nanostructured graphene for spintronics

Fabrication of Graphene/MoS2 Nanocomposite for Flexible Energy Storage

In the present work,MoS2 decorated graphene nanocomposite powders were synthesized by laser scribing method.Theobtainedflexible light-scribed graphene/MoS2composites are very suitableas micro-supercapacitors and thus their performance was evaluated at different concentrations.The effect of laser scribing process to reducegraphene oxide (GO) was investigated. The GO/MoS2composite wassynthesized ...